Measurement system for ion beam profiles using fixed parallel wires and Faraday cup array

The radial profiles of ion current density are measured using a combination two techniques—fixed parallel wires and Faraday cup array—in ring cusp source. These measurements carried out for Ar+ beam in the range 20–90 mA energy 850–1650 eV. Current near extraction plane source obtained by Abel inversion wires. In addition, array provides at different locations along axis. A numerical model is developed utilized estimating divergence focal length from techniques. fixed wire established as an effective method monitoring close to source's when other applications. performance measurement techniques compared with power supply.